| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition that has excellent water repellency, good coatability, and sufficient radiation sensitivity, to provide a polymer composition for preparing the radiation-sensitive resin composition, to provide a cured film formed from the radiation-sensitive resin composition, and to provide an electronic device having the cured film.SOLUTION: The radiation-sensitive resin composition contains: a polymer component having a first structural unit including an acid-dissociative group, a second structural unit including a crosslinkable group, and a third structural unit including at least one of a fluoroalkyl group and a group having a siloxane bond; and a radiation-sensitive acid generator. The polymer composition comprises a polymer component having a first structural unit, a second structural unit, and a third structural unit as mentioned above. The cured film is formed from the radiation-sensitive resin composition. The electronic device has the cured film. |
