Light beam scanning apparatus, laser machining apparatus, test method and laser machining method

摘要

A scanning apparatus for scanning a light beam includes a mirror configured to reflect an incident light beam, a motor configured to rotate the mirror to change a direction along which the light beam reflected by the mirror travels, and a detector configured to obtain a detection value corresponding to a tilt of a detected region of the mirror, with the detection value being changed in accordance with a rotation angle of the mirror. In addition, a processor is configured to obtain a tilt angle of the mirror based on the detection value obtained by the detector and the rotation angle of the mirror.

主权项

1. A scanning apparatus for scanning a light beam, the apparatus comprising:
a mirror configured to reflect an incident light beam; a motor configured to rotate the mirror to change a direction along which a light beam reflected from the mirror travels, the motor including:
a rotation axis the mirror being mounted at a first portion of the rotation axis; anda bearing supporting the rotation axis at a second portion of the rotation axis, the mirror being inclined via a tilt of the first portion of the rotation axis relative to the second portion of the rotation axis; a detector configured to obtain a detection value corresponding to a tilt of a detected region of the mirror, the detection value being changed in accordance with a rotation angle of the mirror; and a processor configured to obtain a tilt angle of the mirror based on the detection value and the rotation angle of the mirror, the tilt angle being an inclination of the mirror relative to a line parallel to the second portion of the rotation axis in a plane including the line and rotated with the mirror.