THREE-DIMENSIONAL MEASUREMENT DEVICE, THREE-DIMENSIONAL MEASUREMENT METHOD, AND MANUFACTURING METHOD OF CIRCUIT BOARD

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional measurement device and the like that can improve a measurement accuracy using a photometric stereo method.SOLUTION: A three-dimensional measurement device includes a height measurement part, a three-dimensional shape measurement part, and a correction part. The height measurement part is configured to measure height or height displacement of a measurement object at a predetermined position. The three-dimensional shape measurement part is configured to measure a three-dimensional shape of the measurement object by a photometric stereo method. The correction part is configured to correct data obtained by the three-dimensional shape measurement part according to data obtained by the height measurement part.