摘要 |
<p>PROBLEM TO BE SOLVED: To achieve a solid-state imaging device capable of correcting spectral balance.SOLUTION: A solid-state imaging device comprises: a first light receiving part 111A, a second light receiving part 111B, and a third light receiving part 111C; a first optical waveguide 141A corresponding to the first light receiving part 111A, a second optical waveguide 141B corresponding to the second light receiving part 111B, and a third optical waveguide 141C corresponding to the third light receiving part 111C; a second insulating film 122 provided in contact with a bottom face of the second optical waveguide 141B; and a third insulating film 123 provided in contact with a bottom face of the third optical waveguide 141C. An interval d1 between a bottom face of the first optical waveguide 141A and an upper surface of the first light receiving part 111A is shorter than an interval d2 between the bottom face of the second optical waveguide 141B and an upper surface of the second light receiving part 111B. The interval d2 between the bottom face of the second optical waveguide 141B and the upper surface of the second light receiving part 111B is shorter than an interval d3 between the bottom face of the third optical waveguide 141C and the upper surface of the third light receiving part 111C.</p> |