发明名称 PROCESSING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a processing method capable of preventing a damage of a workpiece caused by incorrect detection of a processing schedule line.SOLUTION: The processing method includes: a teach step for selecting and storing a first target pattern and a second target pattern both sandwiching a processing schedule line (13) therebetween and for storing a ratio between a first distance from the first target pattern to the processing schedule line and a second distance from the second target pattern to the processing schedule line; a processing schedule line detection step for respectively detecting the first target pattern and the second target pattern on a workpiece (11) and for detecting, as the processing schedule line, a position obtained by dividing the distance between the detected first and second target patterns with the ratio stored in the teach step; and a processing step for processing by using processing means (4) along the processing schedule line detected in the processing schedule line detection step.</p>
申请公布号 JP2015069976(A) 申请公布日期 2015.04.13
申请号 JP20130199915 申请日期 2013.09.26
申请人 DISCO ABRASIVE SYST LTD 发明人 SAWAKI SATOSHI
分类号 H01L21/301 主分类号 H01L21/301
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