| 发明名称 |
MULTIZONE HOLLOW CATHODE DISCHARGE SYSTEM WITH COAXIAL AND AZIMUTHAL SYMMETRY AND WITH CONSISTENT CENTRAL TRIGGER |
| 摘要 |
A showerhead assembly includes a front plate having a front surface, a back surface and a plurality of first through holes connecting the front surface and the back surface, a back plate having a front surface, a back surface and a plurality of second through holes connecting the front surface and the back surface, and an adhesive layer joining the back surface of the front plate and the front surface of the back plate. The plurality of first through holes are aligned with the plurality of second through holes, and the front plate and the back plate are formed from dissimilar materials. |
| 申请公布号 |
US2015097486(A1) |
申请公布日期 |
2015.04.09 |
| 申请号 |
US201414505065 |
申请日期 |
2014.10.02 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
NGUYEN Andrew;RAMASWAMY Kartik;SARODE VISHWANATH Yogananda;MARCACCI Alexander Charles |
| 分类号 |
H01L21/67;H01J7/46 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A showerhead assembly, comprising:
a front plate having a front surface, a back surface and a plurality of first through holes connecting the front surface and the back surface; a back plate having a front surface, a back surface and a plurality of second through holes connecting the front surface and the back surface, wherein the plurality of first through holes are smaller in diameter than the plurality of second through holes; a protective coating is formed on surfaces of the back plate; and an adhesive layer joining the back surface of the front plate and the front surface of the back plate, wherein the plurality of first through holes are aligned with the plurality of second through holes, and the front plate and the back plate are formed from dissimilar materials. |
| 地址 |
Santa Clara CA US |
