发明名称 SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device typified by a display device, which is compatible with large screen size and high definition, and which has good display quality and stably operates and has high reliability.SOLUTION: In a semiconductor device, by using a Cu-containing conductive layer for wiring of a long routing distance, increase in wiring resistance is minimized. Further, by avoiding the Cu-containing conductive layer from overlapping a semiconductor layer where a channel region of a TFT is formed and covering the Cu-containing conductive layer with an insulation layer containing silicon nitride, Cu diffusion can be prevented thereby to allow a highly reliable semiconductor device to be manufactured. Particularly, even though a display device as one embodiment of the semiconductor device grows in size or achieves high definition, the display device ensures good display quality and stable operation.</p>
申请公布号 JP2015065471(A) 申请公布日期 2015.04.09
申请号 JP20140248623 申请日期 2014.12.09
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;KOYAMA JUN;UOJI HIDEKI;NAKAMURA YASUO;SUGAO ATSUHEI
分类号 H01L29/786;G02F1/1368;H01L21/28;H01L21/3205;H01L21/768;H01L23/532 主分类号 H01L29/786
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