| 摘要 |
PROBLEM TO BE SOLVED: To allow a distance from a projection lens of an exposure device to a surface of a workpiece to be correctly adjusted (set) to a focal length of the projection lens without the increase of time required for entire exposure processing, by eliminating the problem of an error in a measurement value of a distance measuring sensor in a method for adjusting the distance between the projection lens and the workpiece.SOLUTION: A distance (Ls) from the projection lens to a surface of a work stage and a distance (Lw) from the projection lens to the surface of the workpiece on the work stage are measured by one distance measuring sensor (laser length measuring machine), and the distance between the projection lens and the workpiece is adjusted (set) on the basis of the difference between the measured distances. |
