发明名称 ヒューズ、半導体装置、半導体装置の製造方法
摘要 <p>A fuse includes a first conductor, an insulating film on the first conductor, a second conductor on the insulating film, a first plug coupled to the first conductor, a second plug and a third plug each coupled to the second conductor, and a cover film formed on the second conductor and having tensile strength.</p>
申请公布号 JP5696620(B2) 申请公布日期 2015.04.08
申请号 JP20110180676 申请日期 2011.08.22
申请人 发明人
分类号 H01L21/82;H01L21/768;H01L21/822;H01L23/532;H01L27/04 主分类号 H01L21/82
代理机构 代理人
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