发明名称 DEHUMIDIFIER FOR THE SCRUBBER HAVING A THERMALLY CONDUCTIVE PLASTIC COOLING PIPE
摘要 <p>The present invention relates to dehumidifier for the scrubber, specifically to the dehumidifier for the scrubber having thermally conductive plastic cooling pipe which is installed integrally with the scrubber or on the exterior of the exhaust duct to minimize condensation of the exhaust duct formed due to moisture generated during toxic gas treatment process, and to prevent environmental safety accident caused by corrosion of the exhaust duct. To this end, the present invention provides dehumidifier for scrubber having thermally conductive plastic cooling pipe including: an inlet unit which is integrally installed with the scrubber, which discharges the hazardous gas having toxic gas introduced from the main apparatus via vacuum pump, or is installed to the exhaust duct to receive the exhaust gas discharged from the scrubber; a dehumidifier space connected with the inlet unit; a dehumidifier chamber having the dehumidifier space and an outlet unit connecting a dehumidifier space and the exhaust duct; multiple thermally conductive plastic cooling pipes installed in the dehumidifier space of the dehumidifier chamber in multiple steps and which condenses the hazardous gas included in the exhaust gas introduced to the dehumidifier space.</p>
申请公布号 KR101508972(B1) 申请公布日期 2015.04.07
申请号 KR20140143095 申请日期 2014.10.22
申请人 发明人
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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