发明名称 SEMICONDUCTOR DEVICE WITH BURIED BIT LINE AND METHOD FOR FABRICATING THE SAME
摘要 A method for fabricating a semiconductor device includes etching a semiconductor substrate to form bulb-type trenches that define a plurality of active regions in the semiconductor substrate; forming a supporter in each of the bulb-type trenches; dividing each active region, of the plurality of active regions, into a pair of body lines by forming a trench through each active region; and forming a bit line in each body line of the pair of body lines.
申请公布号 US2015091070(A1) 申请公布日期 2015.04.02
申请号 US201414565222 申请日期 2014.12.09
申请人 SK hynix Inc. 发明人 CHO Heung-Jae;HWANG Eui-Seong;PARK Eun-Shil
分类号 H01L27/108;H01L29/78 主分类号 H01L27/108
代理机构 代理人
主权项
地址 Gyeonggi-do KR