MASK AND METHOD FOR MANUFACTURING SPACER

摘要

A mask (1) and a method for manufacturing a spacer (2) by utilizing the mask (1). The mask (1) comprises a transparent region and a non-transparent region. The transparent region comprises multiple optical through holes (230) arranged in an array. A phase shift layer (240) is formed in one of the regions of adjacent two optical through holes (230) of the mask (1) to generate a phase shift of a light that passes through. As such, the light intensity of the light passing through the adjacent two optical through holes (230) can be reduced or decreased to zero in a diffraction region, thus mitigating or even preventing the phenomenon of adhesion being formed between adjacent two spacers when manufacturing the spacer (2).