| 发明名称 |
METHOD OF MANUFACTURING A DEVICE WITH A CAVITY |
| 摘要 |
A micro-device includes a substrate with a cavity. The cavity is covered with a porous layer that is permeable to vapor hydrofluoric acid (HF) etchant. The micro-device comprises a Microelectromechanical Systems (MEMS) device with a component that is moveable in operational use of the MEMS device. The component is arranged within the cavity. |
| 申请公布号 |
US2015091411(A1) |
申请公布日期 |
2015.04.02 |
| 申请号 |
US201414562859 |
申请日期 |
2014.12.08 |
| 申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Verheijden Greja Johanna Adriana Maria;Daamen Roel;Koops Gerhard |
| 分类号 |
H02N1/00;H01L21/768 |
主分类号 |
H02N1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micro-device, comprising a substrate with a cavity, wherein the cavity is covered with a porous layer that is permeable to vapor hydrofluoric acid (HF) etchant, wherein the micro-device comprises a Microelectromechanical Systems (MEMS) device with a component that is moveable in operational use of the MEMS device, wherein the component is arranged within the cavity. |
| 地址 |
Hsin-Chu TW |
