| 发明名称 |
METHOD OF EXAMINING A SUBSTRATE AND CORRESPONDING DEVICE |
| 摘要 |
A method of examining a substrate is provided. The method may include: generating a temperature gradient along a surface of the substrate; detecting a heat radiation emitted from the substrate; and determining as to whether the substrate is damaged based on the detected heat radiation. |
| 申请公布号 |
US2015092814(A1) |
申请公布日期 |
2015.04.02 |
| 申请号 |
US201314042771 |
申请日期 |
2013.10.01 |
| 申请人 |
Infineon Technologies AG |
发明人 |
Wolfgruber Christoph |
| 分类号 |
G01J5/02 |
主分类号 |
G01J5/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of examining a substrate, the method comprising:
generating a temperature gradient along a surface of the substrate; detecting a heat radiation emitted from the substrate; and determining as to whether the substrate is damaged based on the detected heat radiation. |
| 地址 |
Neubiberg DE |
