| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that a driving range is limited when a wafer is carried in or out by a transfer robot. <P>SOLUTION: A Z stage device is provided with a structure described as follows: (1) a Z table having a holding surface for holding a sample; (2) a Z frame having a cavity part for housing the Z table so that the Z table moves in the Z direction and an opening for connecting the cavity part with one of an outer side surface; (3) a temporary holding member extending horizontally to the cavity part and temporarily holding the sample from below when the Z table is moved down to a withdrawal position; (4) an upper surface of the Z table where a recess part, housing the temporary holding member, is formed and positioned at a position higher than an upper surface of the temporary holding member when the Z table is positioned at the best position in a movable range. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
