| 摘要 |
<p>PURPOSE: An edge exposing apparatus, an edge exposing method, and a storage medium are provided to prevent the edge of a thin film from being swelled by preventing an exposure out of a light radiation region. CONSTITUTION: A stage unit (10) moves along a guide device (15). The stage unit includes a moving unit (14), a rotating unit (13), a rotary shaft (12), and a rotary stage (11). The rotary stage horizontally maintains a substrate. An exposing unit radiates light for an exposure to the edge of a substrate maintained on the rotary stage. An edge detector (3) optically detects the edge of the substrate maintained on the rotary stage.</p> |
