プラズマエッチング方法,申请号JP20130078378-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	プラズマエッチング方法
摘要
申请公布号	JP5695117(B2)	申请公布日期	2015.04.01
申请号	JP20130078378	申请日期	2013.04.04
申请人		发明人
分类号	H01L21/3065;H05H1/46	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

您可能感兴趣的专利

MEDICINE PACKAGING APPARATUS

Frozen Confection

Call server selection

METHODS FOR MODULATING EMBRYONIC STEM CELL DIFFERENTIATION

Locking device for separating element

CONTROLLER AND CONTROL METHOD OF HYBRID VEHICLE

RFID TRIGGERED PERSONAL ATHLETIC DEVICE

SIGNATURE MANAGEMENT FOR THE UPLINK RANDOM ACCESS CHANNEL

CHARGE-AIR COOLING DEVICE, SYSTEM FOR TURBOCHARGING AND/OR CHARGE-AIR COOLING, METHOD FOR CHARGE-AIR COOLING

Arrangement of a flame-arrester system in the engine of an automobile

PIPE JOINT MEMBER FOR HIGH-PRESSURE FLUID

WIRELESSLY CONTROLLABLE ELECTRICAL FUNCTIONAL UNIT FOR AN AIRCRAFT

INDOOR APPARATUS FOR AIR CONDITIONER

TURBOMACHINE BLADE WITH EROSION AND CORROSION PROTECTIVE COATING AND METHOD OF MANUFACTURING THE SAME

DEVICE AND METHOD FOR COUNTING AND DETECTING FLAT PRODUCTS

Method of dosing reagent

METHODS FOR ONLINE CLINICAL TRIAL RECRUITING

OPTICALLY MULTIPLEXED IMAGING SYSTEMS AND METHODS OF OPERATION

TREATMENT OF DISEASES