Displacement amount monitoring electrode arrangement

摘要

According to a displacement amount monitoring electrode arrangement, there are a linear change region in which the change amount of capacitance changes linearly with the displacement of the movable electrode in the predetermined axis direction, and a nonlinear change region in which the change amount of the capacitance changes nonlinearly with the displacement of the movable electrode in the predetermined axis direction. The nonlinear change region includes a characteristic in which a change sensitivity of the change amount of the capacitance with respect to the displacement amount of the movable electrode in the predetermined axis direction is greater than that in the linear change region, and a target capacitance change amount of the capacitance when the displacement of the movable electrode in the predetermined axis direction reaches a target displacement amount corresponding to the target amplitude is set in the nonlinear change region.

主权项

1. A displacement amount monitoring electrode arrangement in which a fixed electrode fixed with respect to a substrate and a movable electrode configured to be movable in a predetermined axis direction parallel to the substrate, each of which has a comb shape formed by a base portion and plural electrode fingers extending from the base portion in the predetermined axis direction, are arranged such that the electrode fingers of the fixed electrode are engaged with the electrode fingers of the movable electrode, wherein the displacement amount monitoring electrode arrangement is configured to monitor a displacement amount of a detection mass which is to be driven to have a target amplitude based on a change amount of a capacitance between the fixed electrode and the movable electrode,
there are at least one linear change region in which the change amount of the capacitance changes linearly with the displacement of the movable electrode in the predetermined axis direction, and at least one nonlinear change region in which the change amount of the capacitance changes nonlinearly with the displacement of the movable electrode in the predetermined axis direction, the nonlinear change region includes a characteristic in which a change sensitivity of the change amount of the capacitance with respect to the displacement amount of the movable electrode in the predetermined axis direction is greater than that in the linear change region, and a target capacitance change amount of the capacitance when the displacement of the movable electrode in the predetermined axis direction reaches a target displacement amount corresponding to the target amplitude is set in the nonlinear change region.