Self-heated pressure sensor assemblies

摘要

The present invention provides a self-heated pressure sensor assembly and method of utilizing the same. The self-heated pressure sensor assembly regulates and maintains the temperature of the pressure sensor, regardless of the external temperature environment, without an external heater as in prior art embodiments. Exemplary embodiments of the pressure sensor assembly incorporate a resistance heater that is built into the sensing chip of the pressure sensor assembly. The pressure sensor assembly also utilizes the resistance of the pressure sensing elements to monitor the temperature of the assembly, which works alongside the resistance heater to maintain a stable temperature within the pressure sensor assembly.

主权项

1. A method of maintaining temperature within a pressure sensor assembly, comprising:
activating a first plurality of piezoresistive elements associated with a piezoresistive bridge enabling the piezoresistive bridge to measure an applied pressure; monitoring a voltage across a first piezoresistive element of the first plurality of piezoresistive elements associated with the piezoresistive bridge, wherein the voltage is indicative of a temperature within the piezoresistive bridge; and activating a built-in heating element when the voltage across the first piezoresistive element falls below or rises above a threshold value, wherein the built-in heating element comprises one or more of the first plurality of piezoresistive elements.