Method for manufacturing bonded wafer and bonded SOI wafer

摘要

A method for manufacturing a bonded wafer includes: an ion implantation step of using a batch type ion implanter; a bonding step of bonding an ion implanted surface of a bond wafer to a surface of a base wafer directly or through an insulator film; and a delamination step of delaminating the bond wafer at an ion implanted layer, thereby manufacturing a bonded wafer having a thin film on the base wafer, wherein the ion implantation into the bond wafer carried out at the ion implantation step is divided into a plurality of processes, the bond wafer is rotated on its own axis a predetermined rotation angle after each ion implantation, and the next ion implantation is carried out at an arrangement position obtained by the rotation.

主权项

1. A method for manufacturing a bonded wafer comprising: an ion implantation step of ion-implanting at least any one kind of gas ions selected from hydrogen ions and rare gas ions from a surface of a bond wafer to form an ion implanted layer by using a batch type ion implanter, the ion implanter comprising a rotor and a plurality of wafer holders that are provided to the rotor and have substrates arranged thereon and implanting ions into the plurality of substrates that are arranged on the wafer holders and revolve; a bonding step of bonding the ion implanted surface of the bond wafer to a surface of a base wafer directly or through an insulator film; and a delamination step of delaminating the bond wafer at the ion implanted layer, thereby manufacturing a bonded wafer having a thin film on the base wafer,
wherein the ion implantation into the bond wafer carried out at the ion implantation step is divided into a plurality of processes, the bond wafer arranged on each wafer holder is rotated on its own axis a predetermined rotation angle after each ion implantation, and the next ion implantation is carried out at an arrangement position obtained by the rotation.