发明名称 METHOD OF SIMULATING A LEAKAGE CURRENT IN A SEMICONDUCTOR DEVICE
摘要 <p>In a method of estimating a leakage current in a semiconductor device, a chip including a plurality of cells is divided into segments by a grid model. Spatial correlation is determined as spatial correlation between process parameters concerned with the leakage currents in each of the cells. A virtual cell leakage characteristic function of a cell is generated by arithmetically operating actual leakage characteristic functions. A segment leakage characteristic function of a segment is generated by arithmetically operating the virtual cell leakage characteristic functions of all cells in the segment. Then, a full chip leakage characteristic function of the chip is generated by statistically operating the segment leakage characteristic functions of all segments in the chip. Accordingly, computational loads of Wilkinson's method for generating the full chip leakage characteristic function can remarkably be reduced.</p>
申请公布号 KR101504594(B1) 申请公布日期 2015.03.23
申请号 KR20080084718 申请日期 2008.08.28
申请人 发明人
分类号 G01R31/02;H01L21/66 主分类号 G01R31/02
代理机构 代理人
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