发明名称 PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING CURED RELIEF PATTERN, AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin composition which can be cured at a low temperature and gives a cured film excellent in chemical resistance.SOLUTION: The photosensitive resin composition contains a phenolic resin (A), a photoacid generator (B), a solvent (C), and a nonionic surfactant (D). The phenolic resin (A) contains a phenolic resin (A1) modified with a C4-C100 compound having at least one functional group selected from the group consisting of an ether bond, a hydroxyl group, an ester bond, a carboxyl group, a thioether bond, a thiol group, a thioester bond, a sulfo group, a sulfonyl group, a urethane bond, a urea bond, a thiourethane bond, and a thiourea bond.
申请公布号 JP2015055862(A) 申请公布日期 2015.03.23
申请号 JP20130191049 申请日期 2013.09.13
申请人 ASAHI KASEI E-MATERIALS CORP 发明人 OKUDA TOSHIAKI;SASAKI TAKAHIRO
分类号 G03F7/023;C08K5/00;C08L61/04;C08L83/04;G03F7/004;G03F7/038;H01L21/027 主分类号 G03F7/023
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