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发明名称
PELLET BONDING UNIT
摘要
申请公布号
JPS5461467(A)
申请公布日期
1979.05.17
申请号
JP19770127502
申请日期
1977.10.26
申请人
HITACHI LTD
发明人
TOKI HISASHI
分类号
H01L21/677;H01L21/58
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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