| 摘要 |
<p>#CMT# #/CMT# The method involves micromachining a micromechanical part with a silicon core (1), or a batch of parts in a silicon wafer. A layer of silicon dioxide is formed over the entire surface of the part in one step or different steps by thermal oxidation of the surface at a temperature ranging between 900 to 1200 degree Celsius, to obtain a silicon dioxide thickness that is five times greater than a thickness of native silicon dioxide. The layer is removed by chemical attack. A coating in a material having tribological properties higher than that of crystalline silicon is formed on the surface. #CMT#USE : #/CMT# Method for manufacturing a micromechanical reinforced silicon part e.g. escape wheel, toothed wheel, spring, anchor and shaft, for a horological mechanism (all claimed) of a mechanical horological movement. Can also be used for manufacturing a micromechanical passive piece i.e. bearing. #CMT#ADVANTAGE : #/CMT# The layer of silicon dioxide is formed over the entire surface of the part in one step or different steps by thermal oxidation of the surface at the temperature ranging between 900 to 1200 degree Celsius, to obtain the silicon dioxide thickness that is five times greater than the thickness of the native silicon dioxide, and the layer of silicon dioxide is removed by chemical attack, thus eliminating surface fissures and micro openings to avoid clogging of the surface by the fissures, and hence ensuring better resistance of the micromechanical part to impacts and better tribological properties. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a schematic view of a section of a micromechanical reinforced silicon part after elimination of a layer of silicon dioxide. 1 : Silicon core 5 : Interface.</p> |
