| 摘要 |
<p>The present invention relates to a gas detector that can improve air-tightness by engaging a pipeline duct to an exhaust line of a semiconductor fabrication apparatus with a flange assembly, and can detect leaking of gas from an engaged portion of the pipeline duct and a correct leaking position in real time through color change, and a flange assembly having the same. A gas detector capable of detecting leaking of gas from an engaged portion of a pipeline duct used in an exhaust line of a semiconductor fabrication apparatus includes an adhesive tape having paint or paint composition coated on the pipeline duct so as to detect the leaking of the gas in real time through color change. The composition contains 10 to 20 parts by weight of acrylic resin, 5 to 15 parts by weight of titanium dioxide, 15 to 25 parts by weight of barium sulfate, 20 to 30 parts by weight of xylene, 25 parts by weight of ethanol, and 1 to 5 parts by weight of additives.</p> |
