| 摘要 |
PROBLEM TO BE SOLVED: To provide a break apparatus capable of breaking a first substrate and a second substrate without reversing top and bottom surfaces of a bonded substrate.SOLUTION: A break apparatus 100 includes: transportation units 4a to 4c; a first break unit 1; a second break unit 2; and a third break unit 3. The first break unit 1 breaks a first substrate 101 along a first scribe line L1. The second break unit 2 breaks the first substrate 101 along a second scribe line L2. The third break unit 3 breaks a second substrate 102 along a third scribe line L3. The first to third break units 1 to 3 are arranged along a transportation line C. |
