PLASMA RESISTANT MEMBER AND METHOD FOR PRODUCING PLASMA RESISTANT MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a plasma resistant member having high plasma resistance and high durability against temperature change.SOLUTION: There is provided a plasma resistant member which is used by exposing to plasma of a specific gas and comprises a substrate 12 and a protective layer 14 which is deposited by at least a part of the surface of the substrate 12A and is exposed to the plasma. The protective layer 14 has a glass region 22 mainly composed of glass and a plurality of granules 24 mainly composed of a substance having high corrosion resistance against the plasma compared with the main component of the substrate. The protective layer 14 also comprises a plurality of open pores 32 penetrating from a first surface 14A at a side exposed to the plasma to a second surface 14B at a side deposited on the substrate.