Holder for semiconductor wafers and flat substrates

摘要

A holder for a flat substrate, such as for example a semiconductor wafer or a glass slide, has a fixture with a sample insertion groove for holding the flat substrate, or multiple sample insertion grooves for holding multiple flat substrates. The fixture also has a channel milled perpendicular to the sample insertion groove. The channel may be machined such that two portions of the channel open to opposite sides of the fixture. Positioned in the channel of the fixture is a cantilever spring for securing the flat substrate in the sample insertion groove. The channel may contain a single cantilever spring that extends an entire length of the channel, or multiple cantilever springs. The fixture may include a post, dove tail, screw, or clamp for mounting the holder on a stage inside a vacuum chamber of an instrument.

主权项

1. A holder for a flat substrate, the holder consisting of a) a monolithic fixture machined from a single piece of nonmagnetic metal and b) multiple cantilever springs composed of beryllium copper;
wherein the monolithic fixture is machined to have i) a single post for mounting the holder on a stage inside a vacuum chamber of an instrument, ii) a single groove into which the flat substrate may be inserted, and iii) a single channel for holding the multiple cantilever springs within the groove; wherein the multiple cantilever springs are positioned in the channel for securing the flat substrate in the groove and are held in place only by their own compression against an an opposing surface to the channel on an opposite side of the groove; wherein the nonmagnetic material is brass, aluminum, titanium, stainless steel, or copper.