Gaseous Flow Sensor and Related Method Thereof

摘要

A gas flow sensing device, and related method of manufacturing, comprising a conductive layer encapsulated in dielectric film, suspended over a cavity to form a diaphragm. The conductive layer functions as both a heating a sensing element and is patterned to provide uniform heat distribution across the diaphragm. The device is designed to sense flow from any direction relative to the device and the design of the dielectric film and diaphragm reduces sensor drift during prolonged operation.

主权项

1. A low power electronic sensing device for use in measuring gaseous flow, said device comprising:
a dielectric layer with a first surface in communication with a flow to be measured; a substrate in communication with a second surface of said dielectric layer; a cavity in said substrate, wherein a portion of said dielectric layer is substantially in communication with said cavity to form a diaphragm; and a conductive layer disposed on or inside said diaphragm.