发明名称 保持パッド
摘要 PROBLEM TO BE SOLVED: To provide a holding pad capable of stably holding a workpiece for a long period of time.SOLUTION: The holding pad 10 includes an expandable sheet 2 formed of polyurethane resin having a foaming structure in which a plurality of foams 3 and a large number of micropores 6 are continuously formed by a wet film deposition method. Sizes of the large number of micropores 6 are formed smaller than sizes of the foams 3. In the foaming structure formed in the expandable sheet 2, acid-resistant or alkali-resistant resins 5 are present in the large number of micropores 6 at amounts that the proportion of the volume of the acid-resistant or alkali-resistant resins 5 relative to the volume of the micropores 6 becomes ≥30%. The acid-resistant or alkali-resistant resins 5 are formed by impregnating a resin emulsion in the expandable sheet 2. The foaming structure of the expandable sheet 2 is reinforced by the acid-resistant or alkali-resistant resins 5, and surfaces of the micropores 6 are protected thereby.
申请公布号 JP5683194(B2) 申请公布日期 2015.03.11
申请号 JP20100222112 申请日期 2010.09.30
申请人 发明人
分类号 B24B37/30;H01L21/304 主分类号 B24B37/30
代理机构 代理人
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