| 摘要 |
The present invention discloses a slit coater. Specifically, the present invention relates to a liquid chemical supplying apparatus which prevents damage to an inside member of the liquid chemical supplying apparatus included in a slit coater used for manufacturing a flat panel display device, thereby minimizing contamination of a medium solution; and to a slit coater including the same. According to an embodiment of the present invention, the slit coater has much more buffer area formed between a pistol part and an inner wall to receive an extra medium solution inside, thereby enabling the power transferred to the pistol part to spread and accordingly preventing degradation. In addition, the slit coater of the present invention blocks air which flows inside and maintains the volume of the medium solution even though the medium solution is leaked, thereby increasing life-service period of the liquid chemical supplying apparatus and supplying the liquid chemical in a more stable manner. |
