| 发明名称 |
GAS BARRIER FILM AND ELECTRONIC DEVICE |
| 摘要 |
The present invention relates to a gas barrier film having a first gas barrier layer formed by irradiating a polysilazane-containing layer with a vacuum ultraviolet ray, a second gas barrier layer formed by irradiating a polysilazane-containing layer with a vacuum ultraviolet ray, and a hydrophobic intermediate layer disposed between the first gas barrier layer and the second gas barrier layer and containing a metal compound particle. The invention can provide a gas barrier film having extremely excellent gas barrier property and durability and good productivity. |
| 申请公布号 |
US2015064401(A1) |
申请公布日期 |
2015.03.05 |
| 申请号 |
US201314389179 |
申请日期 |
2013.04.01 |
| 申请人 |
Konica Minolta, Inc. |
发明人 |
Honda Makoto |
| 分类号 |
H01L51/52 |
主分类号 |
H01L51/52 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A gas barrier film comprising:
a substrate; a first gas barrier layer formed by irradiating a polysilazane-containing layer with a vacuum ultraviolet ray; a second gas barrier layer formed by irradiating a polysilazane-containing layer with a vacuum ultraviolet ray; and a hydrophobic intermediate layer disposed between the first gas barrier layer and the second gas barrier layer and containing a metal compound particle. |
| 地址 |
Tokyo JP |
