发明名称 PREVENTING OR MITIGATING GROWTH FORMATIONS ON METAL FILMS
摘要 <p>The disclosure, in one aspect, provides an electronics package 100 comprising comprises a substrate 105 and a metal film 110 plated to a surface 107 of the substrate. The metal film has a polycrystalline structure of grains 120 having substantially anisotropic crystal unit cell dimensions. One dimension 130 of the crystal unit cells 125 are oriented in a direction 135 that is substantially perpendicular to the substrate surface for at least about 80 percent of the grains. Metal atoms of the metal film have a slower lattice diffusion coefficient along the perpendicularly-oriented unit cell dimension than along others of the unit cell dimensions 132, 134.</p>
申请公布号 EP2304770(A4) 申请公布日期 2015.03.04
申请号 EP20080772226 申请日期 2008.06.30
申请人 AGERE SYSTEMS, INC. 发明人 OSENBACH, JOHN, W.
分类号 H01L21/00;C25D3/30;C30B7/12;C30B28/04;C30B29/02;C30B29/62 主分类号 H01L21/00
代理机构 代理人
主权项
地址