| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a cylindrical Mo alloy target by which a long integrated type target having high joining strength is efficiently obtained. <P>SOLUTION: The method for manufacturing a cylindrical Mo alloy target includes joining a plurality of cylindrical compacts formed from a Mo powder and a powder of a high melting point metal other than Mo at end faces. The joining end face of one cylindrical compact is formed in a tapered shape having an angle of 5-85°, and the joining end face of the other cylindrical compact is formed in a conical shape having an angle serving as a supplementary angle to the end face of the tapered shape. Thereafter, the cylindrical compact are inserted into a metal capsule having a hollow cylindrical filling space in such a way that the joining end faces are abutted on each other, and then, the capsule is decompressed and sealed, and is subjected to hot isostatic press to obtain an integrated sintered compact. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
