摘要 |
<p>PROBLEM TO BE SOLVED: To calculate a reference position while a tabular workpiece remains held on a holding surface.SOLUTION: In a first measurement step, a position of grinding means 14a when a grinding surface of a grinding wheel 31a contacts a holding surface of a holding table 12a is measured. In a second measurement step, a position of the grinding means 14a when the grinding surface abuts on an upper end of an abutting member 13c is measured. In a correction value calculation step, a difference between the two positions is calculated as a correction valueΔPa. In a third measurement step to be implemented after carrying out a grinding step, a position Pa3 of the grinding means 14a when the grinding surface abuts on the upper end of the abutting member 13c is measured. In a reference position calculation step, a reference position Paa is calculated by correcting the position Pa3 with the correction valueΔPa. The reference position is calculated while a tabular workpiece remains held on holding tables 12a to 12c, by performing the above steps.</p> |