发明名称 LIQUID JET HEAD, LIQUID JET DEVICE AND PIEZOELECTRIC ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a liquid jet head having a piezoelectric layer the orientation of (100) plane of which is enhanced, and to provide a liquid jet device and a piezoelectric element.SOLUTION: A liquid jet head I for jetting liquid from a nozzle opening 21 includes a piezoelectric element 300 having a piezoelectric layer 70, and a first electrode 60 and a second electrode 80 provided on the piezoelectric layer 70. When analyzing the crystal orientation of the piezoelectric layer 70 by electron backscatter diffraction (EBSD), average grain size of crystal grains oriented in a plane direction within 15° from the (100) plane is smaller than that of crystal grains oriented greater than 15° from the (100) plane.
申请公布号 JP2015041710(A) 申请公布日期 2015.03.02
申请号 JP20130172617 申请日期 2013.08.22
申请人 SEIKO EPSON CORP 发明人 SAKAI TOMOHIRO;KATO TATSU
分类号 H01L41/09;B41J2/045;B41J2/055;C01G49/00;H01L21/316;H01L41/187;H01L41/317;H01L41/319;H01L41/332;H01L41/43 主分类号 H01L41/09
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