| 摘要 |
<p>The present invention relates to a process module, a method for manufacturing the same, and a substrate treatment method using a process module. The process module is characterized in that a plurality of cell substrates are fixed to a carrier member by an adhesive according to a preset alignment standard, and a method for manufacturing the same comprises the steps of: aligning the plurality of cell substrates according to a preset alignment standard; applying an adhesive to at least one facing surface between the plurality of cell substrates and the carrier member; and attaching the plurality of cell substrates to the carrier member using the adhesive. The substrate treatment method is characterized in that, using the process module as an integral unit, the substrate treatment process is performed simultaneously with regard to the plurality of cell substrates, and the method may optionally comprise a step of correcting the alignment standard regarding the plurality of cell substrates in the substrate treatment process using an alignment state of the cell substrates on the process module.</p> |
