INSPECTION APPARATUS AND INSPECTION METHOD

摘要

An inspection apparatus is an apparatus for inspecting a solar cell panel. The inspection apparatus includes: an excitation light irradiation part for irradiating the solar cell panel with pulsed light for causing the solar cell panel to radiate an electromagnetic wave pulse; a detection part for detecting the electromagnetic wave pulse radiated from the solar cell panel in response to irradiation with the pulsed light; and a temperature changing part for changing a temperature of the solar cell panel at a part irradiated with the pulsed light.

主权项

1. An inspection apparatus for inspecting a photoelectric device, the inspection apparatus comprising:
an excitation light irradiation part for irradiating said photoelectric device with excitation light for causing said photoelectric device to radiate an electromagnetic wave; a detection part for detecting the electromagnetic wave radiated from said photoelectric device in response to irradiation with said excitation light; and a temperature changing part for changing a temperature of said photoelectric device at a part irradiated with said excitation light.