| 摘要 |
<p>Disclosed is a cluster-batch system to process a substrate. According to the present invention, the cluster-batch system to process the substrate comprises: a substrate carrying unit (1) wherein the substrate is carried into; a plurality of batch type substrate processing devices (9: 9a, 9b, 9c, 9d) horizontally arranged along an arrangement path (P) being arranged on a side or both sides on the basis of the arrangement path (P); a substrate transferring robot (7) performing to load and unload the substrate (40) in the batch type substrate processing devices (9: 9a, 9b, 9c, 9d), moving along the arrangement path (P) from the substrate carrying unit (1).</p> |
