| 摘要 |
The present invention relates to an MEMS microphone including a plurality of diaphragms which forms a first inner space by being combined on a substrate and includes a cover to form a sound transmission hole on the upper side thereof. Also, the present invention includes a transducer which is arranged in the first inner space and converts a sound inputted to the sound transmission hole into an electrical signal. Also, the present invention includes a semiconductor chip which is arranged in the first inner space and amplifies the electrical signal converted in the transducer. A protection diaphragm supported by at least one support stand is formed on the first inner space. |
