| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a constant flow rate valve capable of maintaining cleanliness of fluid in a higher state by suppressing unintended contact between a valve seat and a valve body or the like.SOLUTION: The constant flow rate valve comprises: a valve body part 11 including a contraction part 15 and a valve seat 16; a first diaphragm 30 partitioning first and second chambers 21 and 22; a second diaphragm 35 partitioning third and fourth chambers 26 and 27 and including a valve body 38; a first movable part 40 allowed to be advanced/retreated together with the first diaphragm 30; and a second movable part 50 allowed to be advanced/retreated together with the second diaphragm 35. A curved connection chamber 70 is formed between the second chamber 22 and the fourth chamber 27, an intermediate transmission member 80 engaged with the first and second movable parts 40 and 50 and including a plurality of ball members 81 for transmitting variation of one movable part to the other movable part is provided in the connection chamber 70, and the valve body 38 is advanced/retreated from the valve seat 16 by advance/retreat of the first and second diaphragms 30 and 35 due to pressure variation before and after the contraction part 15 to hold a flow rate of controlled fluid at a fixed value.</p> |
