| 摘要 |
Disclosed are a multi-charged particle beam drawing device and a multi-charged particle beam drawing method. The multi-charged particle beam drawing device according to one aspect of the present invention includes: a beam forming member including a plurality of first openings for drawing and a plurality of second openings formed at peripheral portions of the first openings and used for non-drawing, receiving the charged particle beam in a region including all of the first and second openings, allowing a portion of the charged particle beam to pass through the first openings to form the multi-beam for drawing, and allowing a portion of the charged particle beam to pass through the second openings to form a measurement multi-beam; a measuring unit to measure a plurality of mark members provided on a blanking aperture member provided nearby the height to form cross-over, or interposed between the blanking aperture member and the blanking plate, and the position of the measurement multi-beam using the mark members; and a correction unit to correct voltage, which is used to switch on a beam and applied to each blanker to perform the blanking bias of the drawing multi-beam, to correct the displacement of the measurement multi-beam. |
