| 摘要 |
The invention relates to a microscope and a method for the high-resolution scanning microscopy of a sample (2), comprising - an illuminating device (3) for illuminating the sample (2), - an imaging device (4) for scanning at least one point or line spot (14) over the sample (2) and for imaging the point or line spot (14) into a diffraction-limited stationary individual image (17) on a detection plane (18) using an imaging scale, - a detector device (19) for detecting the individual image (17) on the detection plane (18) for different scanning positions with a spatial resolution which is at least twice as large in at least one extension/dimension as a half-value width of the diffraction-limited individual image (17) while taking into consideration the imaging scale, and - an analyzing device (C) for analyzing a diffraction structure of the individual image (17) for the scanning positions from data of the detector device (19) and for generating an image of the sample (17), said image having a resolution which is increased over the diffraction threshold, wherein - the detector device (19) has a detector array (24), which has pixels (25) and which is larger than the individual image (17), and a non-imaging redistribution element (20-21; 30-34; 30-35) which is arranged upstream of the detector array (24) and which distributes the radiation from the detection plane (18) onto the pixels (25) of the detector array (24) in a non-imaging manner, - an adjustment is carried out in a control circuit by switching redistribution elements and/or by adjusting a zoom/focus optical system in order to adapt the image size and/or connect individual pixels of the detector array using a control signal, and - the adjustment includes the image contrast and/or the image sharpness and/or the signal-to-noise ratio as a control variable. |
