IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION METHOD AND DEFECT INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an image acquisition apparatus, etc. capable of efficiently acquiring appropriate images.SOLUTION: The image acquisition apparatus includes: an electron beam source 15 that generates an electron beam to be irradiated to a measurement object 11; an image detector 18 that detects an electronic image of the measurement object based on the electron beam irradiated to the measurement object from the electron beam source; and a voltage modulation section 20 that modulates at least one of the voltage applied to the electron beam source and the voltage applied to the measurement object.