| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the drawback that it is difficult to be precise in a technique of forming a pattern in a resin film of a flexible color filter or the like in comparison with a glass material while a total pitch and a coordinate positional precision of the pattern are greatly important. <P>SOLUTION: Strain is generated in the resin film by conversely utilizing that the resin film is sensitive to heat or stress, whereby the total pitch and coordinate positional precision are improved. Specifically, a plurality of divided blocks are arranged on a porous chucking stage, and independent stress or heat is applied to the blocks to strain the porous chucking stage. A desired strain is thereby generated in the resin film adsorbed. A coordinate position of a strained pattern can be made close to a design value by utilizing the chucking stage. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
