| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technology which is advantageous for imprinting to a cracked region on a substrate. <P>SOLUTION: An imprint apparatus molds an imprint material on a substrate with a mold and cures the imprint material to form a pattern on the substrate. The imprint apparatus has a supply part supplying imprint materials on the substrate; and a control part controlling the supply operation conducted by the supply part. The supply part supplies a first imprint material and a second imprint material on the substrate, the second imprint material having a stationary contact angle larger than a stationary contact angle of the first imprint material relative to the mold, and the control part controls the supply operation conducted by the supply part so that the first imprint material is supplied to a third region, which is not located adjacent to a second region in a first region, and the second imprint material is supplied to a fourth region, which is located adjacent to the second region in the first region, when the imprint material is molded in the first region of the mold and the imprint material is not molded in the second region of the mold. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
