TOOL HAVING NANO-POLYCRYSTALLINE DIAMOND, WORKING SYSTEM, AND WORKING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a tool containing nano-polycrystal diamond and having a function as a temperature sensor.SOLUTION: A tool contains nano-polycrystal diamond in a region contacting with a workpiece. The nano-polycrystal diamond contains carbon, and a heterogeneous element doped into a crystal structure composed of carbon. The heterogeneous element is one kind or more selected from a group composed of 16-group element other than oxygen, and the atomic concentration of the heterogeneous element is 1×10/cmor more, and less than 1×10/cm.