| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for setting a compensation optical element and a microscope that enable a highly accurate control parameter to be determined.SOLUTION: A method for setting a compensation optical element 42 in a scanning type microscope 10 has: a first step of acquiring a reference image; a second step of causing the compensation optical element to change a wavefront of illumination light into more than two different states, and acquiring a sample image at a plurality of positions within a predetermined range in an optical axis direction including a predetermined position in each state; a third step of selecting a determination image on the basis of a correlation value between the sample image corresponding to each of the plurality of positions and the reference image, in each state of the wavefront; a fourth step of calculating an evaluation values of a predetermined area in the reference image and the determination image in each state of the wavefront, and determining a state of the wavefront on the basis of the evaluation value and the state of the wavefront; and a fifth step of setting the compensation optical system 42 so as to be in the determined state of the wavefront.</p> |
