发明名称 薄膜トランジスタ、アクティブマトリクス基板、およびそれらの製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a TFT, an active matrix substrate, and a manufacturing method for the TFT and the active matrix substrate, that can achieve high display quality. <P>SOLUTION: A thin film transistor comprises: a gate electrode 2a; a gate insulation film 3 provided covering the gate electrode 2a; a semiconductor film 5 disposed on the gate insulation film 3 and over the gate electrode; a source electrode 7 provided on the semiconductor film 5 and electrically connected to the semiconductor film 5; a drain electrode 9 provided on the semiconductor film 5 and electrically connected to the semiconductor film 5; and a low-reflection film 6 provided between the gate insulation film 3 and at least one of the source electrode 7 and the drain electrode 9 and disposed separate from the semiconductor film 5. Outside the gate electrode 2a in a plan view, the low-reflection film 6 has approximately the same shape as, or is larger than the pattern of the source electrode 7 and the drain electrode 9. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5667424(B2) 申请公布日期 2015.02.12
申请号 JP20100271140 申请日期 2010.12.06
申请人 发明人
分类号 H01L21/336;G02F1/1368;H01L29/786 主分类号 H01L21/336
代理机构 代理人
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