发明名称 温度調節装置および温度調節装置の製造方法
摘要 <p>Provided is a temperature adjustment device with which the manufacturing time can be reduced and the uniformity of the temperature distribution of a metal plate can be improved while suppressing strain as well as peeling and cracking between the boundary faces when different materials are joined together. This temperature adjustment device (100) is equipped with: a base plate (41) comprising aluminum or aluminum alloy; a main body plate (3) that has a flow path in the interior and is formed by accelerating a powder of a metal or alloy other than aluminum or aluminum alloy, together with a gas, and spraying these in the solid state toward the base plate (41) and depositing them thereon; and an outer layer plate (42) on which an object the temperature of which is to be adjusted is loaded, and which is formed of the same material as the base plate (41), and covers the main body plate (3).</p>
申请公布号 JP5666395(B2) 申请公布日期 2015.02.12
申请号 JP20110148595 申请日期 2011.07.04
申请人 发明人
分类号 H01L21/02;C23C24/04 主分类号 H01L21/02
代理机构 代理人
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